The electron-ion-plasma technology

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Description

Contents

Introduction ........................................................................... 3 ...
Chapter 1. Production technologies ................................. ....... 6
Chapter 2. The electron-ion-plasma technologies ............... .. ... .19
2.1. Key Features ....................................... ... 19
2.2. Application ......................................................... ... 20
2.3. State and development trends ................................. 20
Chapter 3. Vacuum electron - ion - plasma equipment and technologies of nanostructure layers and coatings ......... .. ... 22
Conclusion ........................................................................ 25
References ............................................................ ..27

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